Journal of Vacuum Science and Technology B
Formerly known as Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Categories:
Chemical Engineering, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Engineering, Instrumentation, Materials Chemistry, Materials Science, Physics and Astronomy, Process Chemistry and Technology, Surfaces, Coatings and Films
Language:
English
Publisher:
AVS Science and Technology Society
ISSN / E-ISSN:
21662746 / 21662754