Journal of Micro/ Nanolithography, MEMS, and MOEMS
Formerly known as Journal of Microlithography, Microfabrication and Microsystems
Categories:
Atomic and Molecular Physics, and Optics, Condensed Matter Physics, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Engineering, Materials Science, Mechanical Engineering, Physics and Astronomy
Language:
Publisher:
SPIE
ISSN / E-ISSN:
19325150 / 19325134
